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“Whether matching a "digital twin" to its physical counterpart in the Fab, or using "big data" to support machine learning applications, the SEMI Equipment Automation Standards are ready for the coming wave of Smart Manufacturing challenges!”
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Bob Reback
President & CEO, Cimetrix

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Frequently-Requested Standards

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An average purchase order for semiconductor fab equipment may contain more than 20 references to SEMI Standards.? Here are some of the more heavily requested families of SEMI Standards.?Learn more.

This series containes Safety Guidelines for fab equipment, gases and processes. Learn more.

The E series covers equipment automation and data compatibility. Learn more.

The M-Series contains a wide-range of standards for materials purity, substrate definitions and more.??Learn more.

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